Fabrication of Si field emitter tip for a three-dimensional vacuum magnetic sensor

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 35, Issue 12 SUPPL. B, 1996, Pages 6629-6631

  Uemura, Koji ^b   Kanemaru, Seigo ^a   Itoh, Junji ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b YASKAWA ELECTRIC CORPORATION   (Japan)

Author keywords

Cross shaped electron beam; Field emitter; Focus lens; Lorentz force; Three dimensions; Vacuum magnetic sensor; Vacuum microelectronics

Indexed keywords

EID: 0004795149     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.35.6629     Document Type: Article

References (5)

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4. C. Py, J. Itoh, T. Hirano and S. Kanemaru: Bull. Electrotech. Lab. 6 (1995) 31.
5. J. Itoh, Y. Tohma, K. Morikawa, S. Kanemaru and K. Shimizu: J. Vac. Sci. & Technol. B 13 (1995) 1968.