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Volumn 77, Issue 5, 1995, Pages 1948-1951

Determination of Si self-interstitial diffusivities from the oxidation-enhanced diffusion in B doping-superlattices: The influence of the marker layers

(8) Gossmann, H J a Gilmer, G H a Rafferty, C S a Unterwald, F C a Boone, T a Poate, J M a Luftman, H S a Frank, W b

a LUCENT TECHNOLOGIES (United States)

b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001705158 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.358828 Document Type: Article

Times cited : (29)

References (25)

1
- 0004865789
- See, for example and references cited therein
- (1986) Appl. Phys. Lett , vol.49 , pp. 1468
- Angelucci, R.¹ Negrini, P.² Solmi, S.³

2
- 0022061598
- (1985) Appl. Phys. A , vol.37 , pp. 1
- Tan, T.Y.¹ Gösele, U.²

3
- 21544435072
- (1987) J. Appl. Phys , vol.61 , pp. 5286
- Bronner, G.B.¹ Plummer, J.D.²

4
- 0001961825
- (1988) Mater. Res. Soc. Symp. Proc , vol.104 , pp. 99
- Morehead, F.F.¹

5
- 33746345232
- (1992) Appl. Phys. A , vol.55 , pp. 121
- Zimmermann, H.¹ Ryssel, H.²

6
- 0011521724
- (1993) Phys. Status Solidi A , vol.137 , pp. 499
- Bracht, H.¹ Stolwijk, N.A.² Yonenaga, I.³ Mehrer, H.⁴

7
- 84950570991
- San Francisco
- (1994) Proceedings of the 7th International Symposium on Silicon Materials Science and Technology
- Bracht, H.¹ Stolwijk, N.A.² Mehrer, H.³

8
- 84950570988
- Ph.D. thesis, Stanford University
- (1989)
- Griffin, P.B.¹

9
- 84950570989
- SRC Technical Report T90091

10
- 36449007860
- (1992) Appl. Phys. Lett , vol.61 , pp. 1513
- van Oostrum, K.J.¹ Zalm, P.C.² de Boer, W.B.³ Gravesteijn, D.J.⁴ Maes, J.W.F.⁵

11
- 0001062374
- (1993) Appl. Phys. Lett , vol.63 , pp. 639
- Gossmann, H.-J.¹ Rafferty, C.S.² Luftman, H.S.³ Unterwald, F.C.⁴ Boone, T.⁵ Poate, J.M.⁶

12
- 0343988588
- (1993) Appl. Phys. Lett , vol.63 , pp. 800
- Agarwal, A.M.¹ Dunham, S.T.²

13
- 21544431744
- (1987) Appl. Phys. Lett , vol.51 , pp. 115
- Griffin, P.B.¹ Ahn, S.T.² Tiller, W.A.³ Plummer, J.D.⁴

14
- 0026221350
- (1991) IEEE Trans. Comput. Aided Design , vol.CAD-10 , pp. 1125
- Law, M.E.¹

15
- 36549100849
- (1989) Appl. Phys. Lett , vol.54 , pp. 1415
- Cowern, N.E.B.¹

16
- 0000987659
- (1994) Appl. Phys. Lett , vol.64 , pp. 2646
- Cowern, N.E.B.¹

17
- 84984102260
- (1968) Phys. Status Solidi , vol.29 , pp. 455
- Seeger, A.¹ Chik, K.P.²

18
- 33746343244
- (1989) Rev. Mod. Phys , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

19
- 9744227454
- (1974) J. Appl. Phys , vol.45 , pp. 1567
- Hu, S.M.¹

20
- 0016117059
- (1974) Acta Metall , vol.22 , pp. 1259
- Koiwa, M.¹

21
- 3643101287
- (1980) Appl. Phys , vol.23 , pp. 361
- Gösele, U.¹ Frank, W.² Seeger, A.³

22
- 21544471898
- (1993) J. Appl. Phys , vol.73 , pp. 8237
- Gossmann, H.-J.¹ Unterwald, F.C.² Luftman, H.S.³

23
- 0002527296
- (1992) Proc. IEDM , vol.92 , pp. 923
- Pinto, M.R.¹ Boulin, D.M.² Rafferty, C.S.³ Smith, R.K.⁴ Coughran, W.M.⁵ Kizilyalli, I.C.⁶ Thoma, M.J.⁷

24
- 21544437231
- (1993) J. Appl. Phys , vol.74 , pp. 3150
- Gossmann, H.-J.¹ Vredenberg, A.M.² Rafferty, C.S.³ Luftman, H.S.⁴ Unterwald, F.C.⁵ Jacobson, D.C.⁶ Boone, T.⁷ Poate, J.M.⁸

25
- 84950571035
- We note that the [formula omitted] values obtained here are significantly larger than those in Ref. 10. This may be due to the improved epitaxial quality of the films in the present work. For example, the samples described in Ref. 10 contained excess Si vacancies leading to an increase of the Sb diffusivity above the literature value. This is not the case for the present samples (H.-J. Gossmann, unpublished)

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