Preparation of ultrasharp diamond tip emitters by ion-beam etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 678-680

  Stepanova, A N ^a   Givargizov, E I ^a   Bormatova, L V ^a   Zhirnov, V V ^a   Mashkova, E S ^b   Molchanov, A V ^b  

^a SHUBNIKOV INSTITUTE OF CRYSTALLOGRAPHY   (Russian Federation)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000197490     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589879     Document Type: Article

References (14)

1. F. J. Himpsel, J. A. Knapp, J. A. Van Vechten, and D. E. Eastman. Phys. Rev. B 20, 624 (1979).
2. J. C. Twichell, M. W. Geis, C. O. Bozler, D. D. Rathman, N. N. Efremov, K. E. Krohn, M. A. Hollis, R. Uttao, T. M. Lyszczarz, M. Kordesh, and K. Okano, Diamond field-emission cathodes/Report on the 6th International Vacuum Microelectronics Conference, Newport, RI, 12-15 July 1993.
3. E. I. Givargizov, V. V. Zhirnov, A. N. Stepanova, E. V. Rakova, A. N. Kiselev, and P. S. Plekhanov, Appl. Surf. Sci. 87/88, 24 (1995).
4. V. V. Zhirnov, E. I. Givargizov, and P. S. Plekhanov, J. Vac. Sci. Technol. B 13, 418 (1995).
5. V. V. Zhirnov, J. Phys. IV 6-C5, 107 (1996).
6. E. I. Givargizov, V. V. Zhirnov, A. N. Stepanova, P. S. Plekhanov, and R. I. Kozlov, Appl. Surf. Sci. 94/95, 117 (1996).
7. V. V. Zhirnov, A. B. Voronin, E. I. Givargizov, and A. L. Meshcheryakova, J. Vac. Sci. Technol. B 14, 2034 (1996).
8. A. N. Stepanova, V. V. Zhirnov, L. V. Bormatova, E. I. Givargizov, E. S. Mashkova, and V. A. Molchanov, J. Phys. IV 6-C5, 103 (1996).
9. A. N. Stepanova et al., Mater. Lett. 22, 285 (1995).
10. E. S. Mashkova et al., Phys. Chem. Mech. Surf. 11, 5 (1995).
11. E. S. Mashkova et al., Phys. Chem. Mech. Surf, (to be published).
12. T. Asano, T. Maruta, T. Ishikura, and S. Yamashita, J. Vac. Sci. Technol. B 13, 431 (1995).
13. W. Zhu, G. P. Kochanski, S. Jin, and L. Seibles, J. Appl. Phys. 78, 2707 (1995).
14. V. V. Zhirnov, G. J. Wojak, W. B. Choi, J. J. Cuomo, and J. J. Hren, J. Vac. Sci. Technol. A 15, 1733 (1997).