Micromachined ultrasharp silicon and diamond-coated silicon tip as a stable field-emission electron source and a scanning probe microscopy sensor with atomic sharpness

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3185-3191

  Rangelow, I W ^a   Shi, F ^a   Hudek, P ^a   Grabiec, P ^a   Volland, B ^a   Givargizov, E I ^b   Stepanova, A N ^b   Obolenskaya, L N ^b   Mashkova, E S ^c   Molchanov, V A ^c  

^a UNIVERSITY OF KASSEL   (Germany)

^b RUSSIAN ACADEMY OF SCIENCES   (Russian Federation)

^c MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000187734     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590348     Document Type: Article

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