In situ measurement of principal refractive indices of thin films by two-angle ellipsometry

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 368-372

  Hodgkinson, Ian ^a   Hazel, Judith ^a   Wu, Qi Hong ^a  

^a UNIVERSITY OF OTAGO   (New Zealand)

Author keywords

Birefringence; Ellipsometry; Thin film

Indexed keywords

ALGEBRA; BIREFRINGENCE; DEPOSITION; ELLIPSOMETRY; FILM GROWTH; LIGHT INTERFERENCE; LIGHT POLARIZATION; LIGHT TRANSMISSION; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; THIN FILMS;

TWO ANGLE ELLIPSOMETRY;

OPTICAL FILMS;

EID: 0031998528     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00848-1     Document Type: Article

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