Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy

Carbon

Volumn 43, Issue 2, 2005, Pages 425-429

  Kromka, A ^a   Breza, J ^a   Kadlecikova M ^a   Janik J ^a   Balon, F ^a  

^a SLOVAK UNIVERSITY OF TECHNOLOGY   (Slovakia)

Author keywords

A. Diamond, diamond like carbon; B. Chemical vapour deposition; C. Raman spectroscopy

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTALLOGRAPHY; DIAMONDS; FINITE ELEMENT METHOD; IDENTIFICATION (CONTROL SYSTEMS); INTERFACES (MATERIALS); RAMAN SPECTROSCOPY; SUBSTRATES; X RAY LITHOGRAPHY;

ANGLE DEFORMATION; CARBON PHASES; DIAMOND, DIAMOND-LIKE CARBON; SUBSTRATE INTERFACES;

CARBON;

EID: 9644281186     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2004.10.004     Document Type: Article

References (9)

1. Knight DS, White WB. Characterization of diamond films by Raman spectroscopy. J Mater Res 1989;4(1):385-93.
2. Prawer S, Nugent KW, Jamieson DN, Orwa JO, Bursill LA, Peng JL. The Raman spectrum of nanocrystalline diamond. Chem Phys Lett 2000;332:93-7.
3. Kromka A, Malcher V, Červeň I. Influence of long time nucleation on homogeneity of diamond films grown on silicon substrates. Acta Phys Slovak 2001;51(1):27-34.
4. von Kaenel Y, Stiegler J, Michler J, Blank E. Stress distribution in heteroepitaxial chemical vapor deposited diamond films. J Appl Phys 1997;81(4): 1726-36.
5. Fan QH, Prereira A, Davim P, Gracio J, Tavares CJ. Friction and adhesion behavior of polycrystalline diamond films deposited on metals. Surf Coat Technol 2000;126(2-3):110-5.
6. Hučko B, Držík M, Vaněk O, Breternitz V, Kromka A, Kremmer J, Remiš M. Thermally induced stresses in diamond films deposited on silicon substrates. In: Proceedings of the 4th international congress on thermal stresses Session 6C. Osaka (Japan) 2001. p. 599-602.
7. Malcher V, Kromka A, Janík J, Dubravcová V, Vogrinčič P. Raman study of free-standing diamond films and coatings deposited on tungsten carbide tools prepared by hot-filament CVD method. Acta Phys Slovak 2000;50(6):673-8.
8. Šatka A. Characterisation of HFCVD diamond layers on WC-Co tool plates. In: Proceedings of the workshop on diamond and diamond-like films physics and applications, Bratislava, Slovakia: STU Bratislava, 2000. p. 62-8.
9. Janík J, Kromka A. Raman spectroscopy - a powerful analytical technique for microelectronic industry. J Electr Engng Slovak 2001;52(3-4):101-3.