Embedded polymer waveguides: Design and fabrication approaches

Superlattices and Microstructures

Volumn 36, Issue 1-3, 2004, Pages 201-210

  Kehagias, N ^a,b   Zankovych, S ^a   Goldschmidt, A ^a   Kian, R ^a   Zelsmann, M ^b   Torres, C M Sotomayor ^a,b   Pfeiffer, K ^c   Ahrens, G ^c   Gruetzner, G ^c  

^a UNIVERSITY OF WUPPERTAL   (Germany)

^b UNIVERSITY COLLEGE CORK   (Ireland)

^c MICRO RESIST TECHNOLOGY GMBH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; CLADDING (COATING); ELECTRON BEAM LITHOGRAPHY; NANOTECHNOLOGY; POLYSTYRENES; POLYTETRAFLUOROETHYLENES; REFRACTIVE INDEX;

CLADDING LAYER; EMBEDDED POLYMER WAVEGUIDES; NANOIMPRINT LITHOGRAPHY; POLYMER SUBSTRATES;

WAVEGUIDES;

EID: 9644270656     PISSN: 07496036     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.spmi.2004.08.005     Document Type: Article

References (6)

1. D. Chigrin, A. Goldschmidt, to be published.
2. H. Ma, A.K.-Y. Jen, L.R. Dalton, Polymer-based optical waveguides: materials, processing and devices, Adv. Mater. 14 (19) (2002).
3. J. Brandrup, E.H. Immergut, Polymer Handbook, 2nd edition, Wiley, New York, 1975.
4. E.P. Plueddemann, Silane Coupling Agents, 2nd edition, Plenum Press, New York, 1991.
5. K. Pfeiffer, F. Reuther, M. Fink, G. Gruetzner, N. Roos, H. Schulz, H.-C. Scheer, J. Seekamp, S. Zankovych, C.M. Sotomayor Torres, I. Maximov, L. Montelius, Ch. Cardinaud, Microelectron. Eng. 67-68C (2003) 266-273; K. Pfeiffer, M. Fink, O. Ahrens, G. Gruetzner, F. Reuther, J. Seekamp, S. Zankovych, C.M. Sotomayor Tones, I. Maximov, M. Beck, M. Graczyk, L. Montelius, H. Schulz, H.-C. Scheer, F. Steingrueber, Microelectron. Eng. 61-62 (1) (2002) 393-398.
6. K. Pfeiffer, F. Reuther, M. Fink, G. Gruetzner, N. Roos, H. Schulz, H.-C. Scheer, J. Seekamp, S. Zankovych, C.M. Sotomayor Torres, I. Maximov, L. Montelius, Ch. Cardinaud, Microelectron. Eng. 67-68C (2003) 266-273; K. Pfeiffer, M. Fink, O. Ahrens, G. Gruetzner, F. Reuther, J. Seekamp, S. Zankovych, C.M. Sotomayor Tones, I. Maximov, M. Beck, M. Graczyk, L. Montelius, H. Schulz, H.-C. Scheer, F. Steingrueber, Microelectron. Eng. 61-62 (1) (2002) 393-398.