Vibroacoustic characteristics of ultrasonic cleaners

Applied Acoustics

Volumn 58, Issue 2, 1999, Pages 211-228

  Kim, Jin O ^a   Choi, Sunghoon ^c   Kim, Jung Ho ^b  

^a Soongsil University   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 9344233822     PISSN: 0003682X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0003-682X(98)00039-5     Document Type: Article

References (11)

1. Morita K. Ultrasonic Cleaning, Kindai Henshu Ltd, Tokyo, 1989 (in Japanese).
2. Qi Q, Brereton GJ. Mechanisms of removal of micron-sized particles by high-frequency ultrasonic waves. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 1995;42(4):619-29.
3. Busnaina AA, Kashkoush II, Gale GW. An experimental study of megasonic cleaning of silicon wafers. Journal of the Electrochemical Society 1995;142(8):2812-7.
4. Mayer A, Shwartzman S. Megasonic cleaning: A new cleaning and drying system for use in semiconductor processing. Journal of Electronic Materials 1979;8(6):855-64.
5. Hatano H, Kanai S. High-frequency ultrasonic cleaning tank utilizing oblique incidence. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 1996;43(4):531-5.
6. Flynn HG. Physics of acoustic cavitation in liquids. In: Physical Acoustics, vol. IB. New York: Academic Press, 1964, (Chapter 9).
7. Ando E, Kagawa Y. Finite element simulation for the design of an ultrasonic cleaning tank. Transactions of the Japanese Institute of Electronics and Communications Engineering 1988;J71-A(5): 1079-90 (in Japanese).
8. Achenbach JD. Wave Propagation in Elastic Solids. Amsterdam: North-Holland Publishing, 1975, 220-6.
9. Viktorov IA. Rayleigh and Lamb Waves. New York. Plenum Press 1967;67-83:117-21.
10. Weast RC, Astle MJ, Beyer WH. CRC Handbook of Chemistry and Physics, 68th ed. Florida: CRC Press, 1988, F58.
11. Sanders FH. Transmission of sound through thin plates. Canadian Journal of Research 1939;17(9):179-93.