Nanocrystal MOS memories obtained by LPCVD deposition of Si nanograins

Solid State Phenomena

Volumn 82-84, Issue , 2002, Pages 663-668

  Vulpio, M ^a   Gerardi, C ^a   Lombardo, S ^a   Ammendola, G ^a   Crupi, I ^a   Rossetti, T ^a   Nastasi, N ^a   Mantarro, G ^a   Nicotra, G ^a  

^a STMICROELECTRONICS   (Italy)

Author keywords

Memory effects; Nanocrystals; Quantum dots

Indexed keywords

CHEMICAL VAPOR DEPOSITION; MOS DEVICES; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; SEMICONDUCTOR QUANTUM DOTS;

LOW PRESSURE CHEMICAL VAPOR DEPOSITION; SILICON NANOGRAIN;

NANOSTRUCTURED MATERIALS;

EID: 9344228975     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (3)