Surface skin development and rupture during sol-gel spin-coating

Journal of Sol-Gel Science and Technology

Volumn 31, Issue 1-3 SPEC.ISS., 2004, Pages 225-228

  Birnie III, Dunbar P ^a  

^a RUTGERS UNIVERSITY   (United States)

Author keywords

Defects; Fluid flow; Spin coating; Surface skin

Indexed keywords

COATINGS; DEFECTS; EVAPORATION; FLOW OF FLUIDS; GELATION; NANOSTRUCTURED MATERIALS; SENSORS; SILICON WAFERS; SOL-GELS; SOLVENTS; SUBSTRATES; SURFACE PROPERTIES;

DEFECT FORMATION; POLYMER COATINGS; SOLVENT EVAPORATION; SURFACE SKIN;

SPIN COATING;

EID: 9244257312     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JSST.0000047992.51244.f1     Document Type: Article

References (6)

1. A.G. Emslie, F.T. Bonner, and C.G. Peck, J. Appl. Phys. 29, 858 (1958).
2. D. Meyerhofer, J. Appl. Phys. 49, 3993 (1978).
3. D.E. Haas, J.N. Quijada, S.J. Picone, and D.P. Birnie, III, in Sol-Gel Optics V, edited by B.S. Dunn, E.J.A. Pope, H. K. Schmidt, and M. Yamane, Proc. SPIE, 3943, 280 (2000).
4. D.P. Birnie, III and Manuel Manley, Physics of Fluids 9, 870 (1997).
5. D.P. Birnie, III, J. Non-Crystalline Solids 218, 174 (1997).
6. X.M. Du, X. Orignac, and R.M. Almeida. J. Am. Ceram. Soc. 78, 2254 (1995).