Combined flow and evaporation of fluid on a spinning disk

Physics of Fluids

Volumn 9, Issue 4, 1997, Pages 870-875

  Birnie III, Dunbar P ^a   Manley, Manuel ^a  

^a University of Arizona   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001113055     PISSN: 10706631     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.869519     Document Type: Article

References (22)

1. A. G. Emslie, F. T. Bonner, and C. G. Peck, "Flow of a viscous liquid on a rotating disk," J. Appl. Phys. 29, 858 (1958).
2. A. Acrivos, M. J. Shah, and E. E. Petersen, "On the flow of a non-Newtonian liquid on a rotating disk," J. Appl. Phys 31, 963 (1960).
3. C. J. Lawrence and W. Zhou, "Spin coating of non-Newtonian fluids," J. non-Newtonian fluid Mech. 39, 137 (1991).
4. J. A. Britten and I. A. Thomas, "non-Newtonian flow effects during spain coating large-area optical coating with colloidal suspensions," J. Appl. Phys. 71, 972 (1992).
5. P. C. Sukanek, "Spain coating," J. Imaging Technol. 11, 184 (1985).
6. B. K. Daniels, C. R. Szmanda, M. K. Templeton, and P. Trefonas III, " Surface tension effects in microlithography-striations," in Advances in Resist Technology and Processing III. SPIE Proc. 631 (SPIE, Bellingham, WA, 1986). pp. 192-201.
7. L. E. Scriven and C. V. Sternling, "The Marangoni effects," Nature (London) 187, 186 (1960).
8. D. P. Birnie III, B. J. J. Zelinski, S. P. Marvel, S. M. Melpolder, and R. L. Roncone, "Film/substrate/vacum-chuck interactions during spincoating," Opt. Eng. 31, 2012 (1992).
9. D. P. Birnie III, B. J. J. Zelinski, and D. L. Perry, "Infrared observation of evaporative cooling during spin coating ," Opt. Eng. 34, 1782 (1995).
10. X. M. Du, X. Orignac, and R. M. Almeida, "Striation-free, spain-coated sol-gel optical films," J. Am. Ceram, Soc. 78, 2254 (1995).
11. B. T. Chen, "Investigation of the solvent-evaporation effect on spin coating of thin films," Polym. Eng. Sci. 23, 399 (1983).
12. K. J. Skrobis, D. D. Denton, and A. V. Skrobis, "Effect of early solvent evaporation on the mechanism of the spin-coating of polymeric solutions," Polym. Eng. Sci. 30, 193 (1990).
13. D. E. Bornside, C. W. Macosko, and L. E. Scriven, "On the modeling of spain coating," J. Imaging Technol. 13, 122 (1987).
14. W. W. Flack, D. S. Soong, A. T. Bell, and D. W. Hess, "A mathematical model for spin coating of polymer resists," J. Appl. Phys. 56, 1199 (1984).
15. T. Ohara, Y. Matsumoto, and H. Ohashi, "The film formation dynamics in spain coating," Phys. Fluids A 1, 1949 (1989).
16. D. Meyerhofer, "Characteristics of resist films producted by spinning," J. Appl. Phys. 49, 3993 (1978).
17. E. C. Cobb and O. A. Saunders, "Heat transfer from a rotating disk," Proc. R. Soc. 236, 343 (1956).
18. F. Kreith, J. H. Taylor, and J. P. Chong, "Heat and mass transfer from a rotating disk," J. Heat Transfer May, 95 (1959).
19. F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, "Real-time optical monitoring of spin coating," J. Phys. III, France 3, 2059 (1993).
20. F. Horowitz, E. Yeatman, E. Dawnay, and A. Fardad, "Optical monitoring of the sol to gel transition in spinning silica films," in Sol-Gel Optics III (SPIE, Bellingham, W a. 1994), Vol. 2288, pp. 67-70.
21. CRC Handbook of Chemistry and Physics, 76th ed (CRC, Boca Raton FL, 1995).
22. B. V. Deryaguin, V. V. Karasev, I. A. Lavygin, I. I. Skorokhodov, and E. N. Khromova, "Boundary viscosity of polydimethylsiloxane liquids and their binary mixtures," in Thin Liquid Flims and Boundary Layers, Special Discussions of the Faraday Soc. 1, 98 (1970).