Radiative striations of spin-coating films: Surface roughness measurement and in-situ observation

Journal of Sol-Gel Science and Technology

Volumn 31, Issue 1-3 SPEC.ISS., 2004, Pages 245-248

  Kozuka, Hiromitsu ^a   Ishikawa, Yuta ^a   Ashibe, Naoki ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

Radiative striations; Spin coating; Surface roughness; Thin films

Indexed keywords

ALCOHOLS; EVAPORATION; HEAT CONVECTION; HEAT TREATMENT; MICROSCOPES; SILICA; SOLS; SPIN COATING; SUBSTRATES; SURFACE ROUGHNESS;

RADIATIVE STRIATIONS; SILICA GEL FILMS; SOL LAYERS; SPIN-ON FILMS;

THIN FILMS;

EID: 9244255804     PISSN: 09280707     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JSST.0000047996.53649.3d     Document Type: Article

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