Optimization of transient heater settings to provide spatially uniform heating in manufacturing processes involving radiant heating

Numerical Heat Transfer; Part A: Applications

Volumn 46, Issue 7, 2004, Pages 651-667

  Daun, K J ^a   Howell, J R ^a   Morton, D P ^a  

^a The University of Texas at Austin   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; FOUNDRIES; GAIN CONTROL; HEATING; OPTIMIZATION; PROBLEM SOLVING; RAPID THERMAL ANNEALING; TEMPERATURE DISTRIBUTION;

HIGH-GAIN CONTROLLERS; SEMICONDUCTOR WAFERS; TRANSIENT HEATERS;

HEAT TRANSFER;

EID: 9144273954     PISSN: 10407782     EISSN: None     Source Type: Journal    
DOI: 10.1080/104077890504375     Document Type: Article

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