Line-addressable digital-deflection programmable micromirror array

Optics Letters

Volumn 29, Issue 22, 2004, Pages 2581-2583

  Zhou, Guangya ^a   Logeeswaran, V J ^a   Chau, Fook Siong ^a   Tay, Francis E H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BINARY CONTROL BITS; MICROMIRROR ARRAYS; MIRROR ELEMENTS;

ACTUATORS; ELECTRODES; LASER BEAMS; MICROELECTRONICS; PROCESS CONTROL;

OPTICAL DEVICES;

EID: 9144265552     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.29.002581     Document Type: Article

References (4)

1. A. Tuantranont and V. M. Bright, IEEE J. Sel. Top. Quantum Electron. 8, 33 (2002).
2. D. Koester, A. Cowen, R. Mahadevan, M. Stonefeld, and B. Hardy, "PolyMUMPS design handbook," http:// www.memscap.com/memsrus/svcrules. html.
3. M. K. Lee, W. D. Cowan, B. M. Welsh, V. M. Bright, and M. C. Roggemann, Opt. Lett. 23, 645 (1998).
4. Y. Nemirovsky and O. Bochobza-Degani, J. Microelectromechan. Syst. 10, 601 (2001).