A MEMS-actuated tunable microdisk resonator

2003 IEEE/LEOS International Conference on Optical MEMS

Volumn , Issue , 2003, Pages 28-29

  Lee, M C M ^a   Wu, M C ^a  

^a University of California   (United States)

Author keywords

Actuators; Coupling circuits; Fabrication; Micromechanical devices; Optical resonators; Optical waveguides; Resonator filters; Tunable circuits and devices; Waveguide discontinuities; Wavelength division multiplexing

Indexed keywords

ACTUATORS; COUPLED CIRCUITS; FABRICATION; MICROMECHANICAL RESONATORS; MICROWAVE FILTERS; MOEMS; OPTICAL RESONATORS; OPTICAL WAVEGUIDES; RESONATORS; WAVEGUIDE DISCONTINUITIES; WAVEGUIDES; WAVELENGTH DIVISION MULTIPLEXING;

FABRICATED DEVICE; INTEGRATED MEMS; MICRODISK RESONATORS; MICROMECHANICAL DEVICE; QUALITY FACTORS; RESONATOR FILTERS; TUNABLE CIRCUITS AND DEVICES;

WAVEGUIDE FILTERS;

EID: 9144237414     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2003.1233451     Document Type: Conference Paper

References (5)

1. B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, "Microring Resonator Channel Drop Filter", Journal of Lightwave Technology, Vol. 15, No. 6, Jun. 1997, pp. 998-1005
2. G. Lenz, B. J. Eggleton, C. K. Madsen, and R. E. Slusher, "Optical Delay Line on Optical Filter", IEEE Journal of Quantum Electronics", Vol. 37, No. 4, Apr. 2001, pp.525-532
3. C. K. Madsen, G. Lenz, A. J. Bruce, M. A. Cappuzzo, L. T. Gomez, T. N. Nielsen, L. E. Adams, and I. Brenner, "An All-Pass Filter Dispersion Compensator Using Planar Waveguide Ring Resonators", OFC/IOOC'99. Optical Fiber Communication Conference and the International Conference on Integrated Optics and Optical Fiber Communications (Cat. No.99CH36322). IEEE. Part vol.4, 1999, pp.99-101 vol.4. Piscataway, NJ, USA.
4. B. E. Little, S. T. Chu, W. Pan, and Y. Kokubun, "Microring Resonator Arrays for VLSI Photonics", IEEE Photonics Technology Letters, Vol. 12, No. 3, Mar. 2000, pp.323-325.
5. Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, "Fabrication of Ultralow-loss Si/SiO2 Waveguides by Roughness Reduction", Optics Letters, Vol. 23, No. 23, Dec. 1, 2001, pp. 1888-1890.