Fluid dynamic assembly of semiconductor blocks for heterogeneous integration

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 9 A, 2004, Pages 5951-5954

  Soga, Ikuo ^a   Ohno, Yutaka ^a   Kishimoto, Shigeru ^a   Maezawa, Koichi ^a   Mizutani, Takashi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Fluid dynamic assembly; Fluidic self assembly; GaAs; Heterogeneous integration; Si

Indexed keywords

COMPUTER SIMULATION; EPITAXIAL GROWTH; ETCHING; FLUID DYNAMICS; GROWTH KINETICS; HIGH ELECTRON MOBILITY TRANSISTORS; LIGHT EMITTING DIODES; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PROBABILITY; SELF ASSEMBLY; SEMICONDUCTING SILICON; TORQUE;

FLUID DYNAMIC ASSEMBLY (FDA); FLUIDIC SELF-ASSEMBLY; GAAS; HETEROGENEOUS INTEGRATION (HI);

SEMICONDUCTOR MATERIALS;

EID: 9144225118     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.5951     Document Type: Article

References (4)

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4. I. Soga, Y. Ohno, S. Kishimoto, K. Maezawa and T. Mizutani: Jpn. J. Appl. Phys. 42 (2003) 2226.