Fluidic assembly of thin GaAs blocks on Si substrates

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 4 B, 2003, Pages 2226-2229

  Soga, Ikuo ^a   Ohno, Yutaka ^a   Kishimoto, Shigeru ^a   Maezawa, Koichi ^a   Mizutani, Takashi ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Epitaxial liftoff; Fluidic self assembly; GaAs; Heterogeneous integration; Si

Indexed keywords

ANNEALING; RAMAN SPECTROSCOPY; SEMICONDUCTING SILICON; VAN DER WAALS FORCES;

EPITAXIAL LIFTOFF PROCESS; FLUIDIC SELF ASSEMBLY; HETROGENEOUS INTEGRATION;

SEMICONDUCTING GALLIUM ARSENIDE;

EID: 0038009862     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.2226     Document Type: Article

References (3)

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3. J. J. Talghader, J. K. Tu and J. S. Smith: IEEE Photon. Technol. Lett. 11 (1995) 1321.