Characterization of the Young's modulus of CMOS thin films

ASTM Special Technical Publication

Volumn , Issue 1413, 2001, Pages 139-151

  Hossain, Naushad ^a   Ju, J W ^a   Warneke, Brett ^b   Pister, Kristofer S J ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Beam; CMOS; CMOS micromachining; Deflection; MOSIS; Residual stress; Thin films; Young's modulus

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELASTIC MODULI; MICROELECTROMECHANICAL DEVICES; PASSIVATION; POLYSILICON; RESIDUAL STRESSES; SCANNING ELECTRON MICROSCOPY;

BEAM; CMOS MICROMACHINING; DEFLECTION; MOSIS;

THIN FILMS;

EID: 8844286096     PISSN: 00660558     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1520/stp10987s     Document Type: Conference Paper

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