Active damping with piezoelectric MEMS devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5386, Issue , 2004, Pages 301-308

  Collet, M ^a   Walter, V ^a   Delobelle, P ^a  

^a FEMTO ST INSTITUTE   (France)

Author keywords

MEMS transducers; Piezelectric thin layers; Sky hook active isolation

Indexed keywords

ACTUATORS; BEAMS AND GIRDERS; DAMPING; FEEDBACK; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; THICK FILMS; TRANSDUCERS; VIBRATIONS (MECHANICAL);

MECHANICAL STRUCTURES; MICROELECTROMECHANICAL SYSTEMS (MEMS) TRANSDUCERS; PIEZOELECTRIC THIN LAYERS; SKY-HOOK ACTIVE ISOLATION; VELOCITY FEEDBACK;

MICROELECTROMECHANICAL DEVICES;

EID: 8844281964     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540406     Document Type: Conference Paper

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