An AFM based nanomanipulation system with 3D nano forces feedback

Proceedings - 2004 International Conference on Intelligent Mechatronics and Automation

Volumn , Issue , 2004, Pages 18-22

  Tian, Xiaojun ^a,b   Jiao, Niandong ^a,b   Liu, Lianqing ^a,b   Wang, Yuechao ^a   Dong, Zaili ^a   Xi, Ning ^c   Li, Wenjung ^d  

^a SHENYANG INSTITUTE OF AUTOMATION   (China)

^b UNIVERSITY OF CHINESE ACADEMY OF SCIENCES   (China)

^c Michigan State University   (United States)

^d CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

3D Nano Forces Sensing; Lateral Error Compensating of Probe Positioning; Nanomanipulation System

Indexed keywords

ATOMIC FORCE MICROSCOPY; FEEDBACK; GAGES; KINEMATICS; LITHOGRAPHY; MATHEMATICAL MODELS; NANOTECHNOLOGY; PROBLEM SOLVING; SENSORS; VAN DER WAALS FORCES;

3D NANO FORCES SENSING; ATOMIC FORCE MICROSCOPES (AFM); LATERAL ERROR COMPENSATING OF PROBE POSITIONING; NANOMANIPULATION SYSTEMS;

MANIPULATORS;

EID: 8844254749     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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