Prediction of the applicability of active damping elements in high-precision machines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5383, Issue , 2004, Pages 211-220

  Holterman, Jan ^a   De Vries, Theo J A ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Active damping; Collocation; Piezoelectric actuators; Piezoelectric sensors; Vibration control

Indexed keywords

COMPUTER SIMULATION; DAMPING; FEEDBACK; MATHEMATICAL MODELS; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS; ROBUSTNESS (CONTROL SYSTEMS); VIBRATION CONTROL;

ACTIVE DAMPING; COLLOCATION; HIGH-PRECISION MACHINES; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC SENSORS;

ACTUATORS;

EID: 8844250153     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.538927     Document Type: Conference Paper

References (5)

1. J. Holterman, Vibration Control of High-precision Machines using Active Structural Elements, PhD thesis, Control Laboratory, University of Twente, Enschede, The Netherlands, 2002.
2. J. Holterman and T.J.A. de Vries, 'Active damping within a microlithography system using piezoelectric Smart Discs', Mechatronics, 14(1), pp. 25-34, 2004.
3. A. Preumont, Vibration Control of Active Structures, Kluwer Academic Publishers, Dordrecht, The Netherlands, 1997.
4. A. Preumont, J.P. Dufour, and C Malékian, 'Active Damping by a Local Force Feedback with Piezoelectric Actuators', AIAA Journal of Guidance, Control and Dynamics, 15(2), pp. 390-395, 1992.
5. th International Conference on Motion and Vibration Control 'MoViC 2000', University of Technology, Sydney, Australia, pp. 643-648, 2000.