|
Volumn 270-273, Issue II, 2004, Pages 1147-1152
|
Effects of metal-plasma source ion implantation on tribological properties of a DLC film
|
Author keywords
Diamond like Carbon (DLC); Metal Plasma Source ton Implantation (Me PSII); Roughness; Wear
|
Indexed keywords
ATOMIC FORCE MICROSCOPY;
FRICTION;
HARDNESS;
ION BEAM ASSISTED DEPOSITION;
ION IMPLANTATION;
PLASMA SOURCES;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SURFACE ROUGHNESS;
TRIBOLOGY;
ULTRASONIC CLEANING;
WEAR OF MATERIALS;
WEAR RESISTANCE;
ION DOSES;
METAL-PLASMA SOURCE ION IMPLANTATION (ME-PSII);
WEAR TESTS;
DIAMOND LIKE CARBON FILMS;
|
EID: 8744287623
PISSN: 10139826
EISSN: 16629795
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (3)
|
References (12)
|