Microstructural characterisation of RF magnetron sputtered ZnO thin films on SiC

Solid State Phenomena

Volumn 99-100, Issue , 2004, Pages 123-126

  Trinchi, A ^a   Wlodarski, W ^a   Santucci, S ^b   Di Claudio, D ^b   Passacantando, M ^b   Cantalini, C ^b   Rout, B ^c   Ippolito, S J ^a   Kalantar Zadeh, K ^a   Sberveglieri, G ^d  

^a RMIT UNIVERSITY   (Australia)

^b UNIVERSITY OF L'AQUILA   (Italy)

^c UNIVERSITY OF MELBOURNE   (Australia)

^d UNIVERSITY OF BRESCIA   (Italy)

Author keywords

RBS; SiC; Thin Films; XPS; XRD; ZnO

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; CHEMICAL SENSORS; MAGNETRON SPUTTERING; MICROSTRUCTURE; THIN FILMS; X RAY DIFFRACTION; X RAY PHOTOELECTRON SPECTROSCOPY; ZINC OXIDE; ACOUSTIC WAVES; II-VI SEMICONDUCTORS; METALLIC FILMS; OPTICAL FILMS; RUBIDIUM; SCHOTTKY BARRIER DIODES; SILICON CARBIDE; SILICON COMPOUNDS;

ANNEALING TEMPERATURE; FILM THICKNESS; RBS; RUBBER ADDITIVES; ANNEALING TEMPERATURES; HYDROGEN GAS SENSORS; MICRO-STRUCTURAL CHARACTERIZATION; MICROSTRUCTURAL CHARACTERISATION; RF MAGNETRONS; SCHOTTKY DIODES; SURFACE ACOUSTIC WAVES; ZNO THIN FILM;

SILICON CARBIDE; THIN FILMS;

EID: 8744256616     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.99-100.123     Document Type: Conference Paper

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4. S. Kaciulis, G. Mattogno, Surf. Interface Anal. Vol. 30 (2000), p. 502
5. J.Chastain, Handbook of X-Ray photoelectron spectroscopy, (Perkin Elmer Corporation and Physical Electronics Division, Eden Praire, Minnesota, USA)