3-dimensional micro-structure inspection by phase-shifting digital holography

Key Engineering Materials

Volumn 270-273, Issue I, 2004, Pages 756-761

  Yun, Hae Young ^a   Jeong, Seung Jun ^a   Kang, Jeon Woong ^a   Hong, Chung Ki ^a  

^a Pohang University of Science and Technology (POSTECH)   (South Korea)

Author keywords

Digital Holography; Interference Microscopy; Phase Shifting Interferometry

Indexed keywords

ABERRATIONS; IMAGE PROCESSING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PHASE SHIFT; SCANNING;

DIGITAL HOLOGRAPHY; INTERFERENCE MICROSCOPY; OPAQUE OBJECTS; PHASE-SHIFTING INTERFEROMETRY;

HOLOGRAPHIC INTERFEROMETRY;

EID: 8644234131     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.270-273.756     Document Type: Conference Paper

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