Ultrasonic characterization of thin film material constants and defects

Key Engineering Materials

Volumn 270-273, Issue I, 2004, Pages 8-13

  Achenbach, Jan D ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

Acoustic Microscopy; Laser Based Ultrasonics; Material Properties; Measurement Models; Thin Films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATINGS; CORROSION PROTECTION; ELASTIC MODULI; LASER BEAMS; MATHEMATICAL MODELS; NONDESTRUCTIVE EXAMINATION; PHYSICAL VAPOR DEPOSITION; STIFFNESS; ULTRASONICS;

ACOUSTIC MICROSCOPY; LASER-BASED MICROSCOPES; MEASUREMENT MODELS; THIN FILM COATINGS;

THIN FILMS;

EID: 8644232526     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.270-273.8     Document Type: Conference Paper

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