Integration of modeling and acoustic microscopy measurements for thin films

Journal of the Acoustical Society of America

Volumn 107, Issue 5 I, 2000, Pages 2462-2471

  Guo, Zhiqi ^a   Achenbach, J D ^a   Madan, Anita ^a   Martin, Keith ^a   Graham, M E ^a  

^a NORTHWESTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; ARTICLE; FILM; MATHEMATICAL MODEL; MICROSCOPY; PRIORITY JOURNAL; REFLECTOMETRY; SOUND TRANSMISSION; VELOCITY;

EID: 0034025666     PISSN: 00014966     EISSN: None     Source Type: Journal    
DOI: 10.1121/1.428633     Document Type: Article

References (11)

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9. G. W. Farnell, "Properties of Elastic Surface Waves," in Physical Acoustics, Vol. VI, edited by W. P. Mason and R. N. Thurston (Academic, New York, 1970), pp. 109-165.
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11. A. G. Every, W. Pang, J. D. Comins, and P. R. Stoddart, "Brillouin scattering study of guided modes in TiN films on high-speed steel," Ultrasonics 36, 223-227 (1998).