Interdisciplinary research on modeling and scheduling of semiconductor manufacturing operations

ASEE Annual Conference Proceedings

Volumn , Issue , 2000, Pages 3657-3666

  Collins, Donald ^a   Golshani, Forouzan ^b   Hoppensteadt, Frank ^a   Ringhofer, Christian ^a   Jennie, S I ^b   Tsakalis, Kostas ^b  

^a ARIZONA STATE UNIVERSITY   (United States)

^b Arizona State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION FACILITIES; INTEL (CO); MOTOROLA (CO); SEMICONDUCTOR MANUFACTURING;

COMPUTER SIMULATION; CONTROL THEORY; ENGINEERING EDUCATION; ENGINEERING FACILITIES; FABRICATION; HEURISTIC METHODS; RESEARCH; SCHEDULING; STUDENTS;

SEMICONDUCTOR MATERIALS;

EID: 8644222115     PISSN: 01901052     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (48)

1. Beaumerage, T. and Kempf, K., The nature and origin of chaos in manufacturing systems, Proceedings of the IEEE Advanced Semiconductor Manufacturing Conference, November 1994, pp. 169-174.
2. Cale, T.S., Crouch, P.E., Song, L. and Tsakalis, K.S., "Optimal Control for LPCVD," Proc. Symposium on Process Control, Diagnostic and Modeling in Semiconductor Manufacturing, The Electrochemical Society, Vol. 95-2, 97-107, Reno, May 1995.
3. Collins, D.W., Williams, K., and Hoppensteadt, F.C., Implementation of Minimum Inventory Variability Scheduling 1 -Step Ahead Policy in a Large Semiconductor Manufacturing Facility, 6th Annual IEEE International Conference on Emerging Technologies and Factory Automation, UCLA, Los Angeles, Sept 9-12, 1997.
4. Collins, D.W. and Hoppensteadt, F.C., Investigation of Minimum Inventory Variability Scheduling Policies in a Large Semiconductor Manufacturing Facility, 1997 American Control Conference, Albuquerque, New Mexico, June 4-6, 1997.
5. Collins, D.W. "The Implementation of a Simulation Model from Raw Wafer Arrival Through Probe and Shipping", The 3rd Annual Semiconductor Manufacturing Control and Optimization Workshop, Sponsored by the Systems Science and Engineering Research Center, Arizona State University, February 14, 1997.
6. Collins, D.W. "Test Minimum Inventory Variability Policies (MIVP) by Implementation within a real Wafer FAB using Discrete Event Simulation Modeling", Large Database Workshop, Sponsored by the Systems Science and Engineering Research Center, Arizona State University, January-24, 1997.
7. Collins, D.W. and Zaslavsky, B.G., "A Numerically Effective Optimization Technique for Scheduling Time Varying Production Flows in Semiconductor Manufacturing", INFORMS 1996 Conference, Atlanta Georgia, November 3-6,1996.
8. Collins, D.W., "Minimum Inventory Variability Schedule with Applications in Semiconductor Fabrication", Proceedings of Motorola International Symposium on Factory Integration and Modeling, March 13-14, 1995, Austin Texas (invited paper)
9. Dimitrova, N. & Golshani, F., "Motion recovery for video content classification", ACM Transactions on Office Information Systems, Vol. 13, No. 4, Oct. 1995, pp 418-449.
10. ElAdl, M.K., Rodriguez, A.A. and Tsakalis, K.S., "Hierarchical Modeling and Control of Re-Entrant Semiconductor Manufacturing Facilities," Proc. 36th Conference on Decision and Control, 1737-1743, Kobe, Japan, Dec. 1996.
11. ∞ controller for the diffusion bay for a priori maintenance.", presented at the SSERC Seminar of Multiscale Integration of Manufacturing and Assembly Processes, October 17, 1997, ASU.
12. Golshani, F., Nielson, G. and Henderson, M., "Multimedia processing in concurrent engineering", in Concurrent Engineering, Vol. 2, 1994, pp 138-143.
13. Golshani, F. & Kadur, S. "Control of Delay in Continuous Multimedia Applications", in "Multimedia over the Broadband Network: Business Opportunities and Technologies", International Engineering Consortium, 1996, pp 309-320
14. Golshani, F., Henderson, M., & Nielson, G., "The impacts and applications of visualization and multimedia technologies in concurrent engineering", Scientific Computing and Automation, Vol. 12, No. 10, 1995, pp 15-26.
15. Grassi, E. and Tsakalis, K.S., "PID Controller Tuning by Frequency Loop-Shaping," Proc. 36th Conference on Decision and Control, 4776-4781, Kobe, Japan, Dec. 1996.
16. Hoppensteadt, F., Analysis and Simulation of Chaotic Systems, Springer-Verlag, New York, 1993.
17. Hoppensteadt, F., Mathematical Methods of Population Biology, Cambridge University Press, New York, 1982.
18. Jun, K.S., Rivera, D.E., Tsakalis, K.S., Liaw, H.M., Hall, E., and Stein, C., "PID Optimization for Temperature Control of Epitaxial Growth," Proc. ECS Conference, 383-384, Montreal, Feb. 1997.
19. Kempf, K., Detailed description of a two-product, six-step five-machine re-entrant semiconductor manufacturing system, prepared report, Intel Corporation, Technology & Manufacturing Group, August, 1994", also summarized in http://enuxsa.eas.asu.edu/-tsakalis/INTEL.htm.
20. Kristoff, J.J., Song, L.J., Tsakalis, K.S. and Cale, T.S., "Optimally Controlled Programmed Rate Deposition of Tungsten," VLSI Multilevel Interconnect Conference}, Santa Clara, CA, June 1997.
21. Kumar, P.R., Re-entrant lines, Technical report, Coordinated Systems Laboratory, University of Illinois, Urbana, IL, received 1994.
22. Kumar, S. and Kumar, P.R., The last buffer first serve priority policy is stable for stochastic re-entrant lines, Technical report, Coordinated Systems Laboratory, University of Illinois, Urbana, IL, received 1994.
23. Li, S., Tang, T, and Collins, D.W., "Minimum Inventory Variability Schedule with Applications in Semiconductor Fabrication," IEEE Transaction on Semiconductor Manufacturing, Vol. 9, No. 1, pp. 146-149, Feb. 1996.
24. Li, Shu, Tang, T., and Collins, D.W., Minimum inventory variability schedule with applications in semiconductor fabrication, in: Motorola International Symposium on Factory Integration and Modeling, March 13-14, Austin, Texas, Motorola, Manufacturing Technology Group, 1995.
25. Limanond, S., Si, J., and Tseng, YL., "Production data based optimal etch time control design for a reactive ion etching process" IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 12: (1) 140-147 FEB 1999.
26. Palmiri, V. and Collins, D.W., Analysis of the "K-Step Ahead" Minimum Inventory Variability Policy Using SEMATECH Semiconductor Manufacturing Data in a Discrete-Event Simulation Model, 6th Annual IEEE International Conference on Emerging Technologies and Factory Automation, UCLA, Los Angeles, Sept 9-12, 1997.
27. Rastogi, R., Kozicki, M., & Golshani, F. "ExPro: An expert system based process management system", IEEE Trans, on Semiconductor Manufacturing, Vol. 6, No. 3, 1993, pp 207-218.
28. Ringhofer, C. and Poupaud, F. Quantum Hydrodynamics in Semiconductor Crystals', Appl. Math. Letters 8, pp.55-59, 1995.
29. Ringhofer, C. with Arnold, A., 'An Operator Splitting Method for the Wigner Poisson Problem', SIAM J. Num. Anal. 34,pp. 1622-1644 1996.
30. Ringhofer, C. and C. Gardner The smooth quantum potential for the hydrodynamic model', Phys. Rev. E 53, pp.157-167, 1996.
31. Ringhofer, C., Gobbert, M.K. and Cale, T.S., One approach to combining equipment scale and feature scale models', In M. Meyyappan, D.J. Economou, and S. W. Butler, editors, Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing, pages 553-563. Electrochemical Society, 1995.
32. Ringhofer, C. and Poupaud, F., 'Semi - classical limits in a crystal with exterior potentials and effective mass theorems' Communications in Partial Differential Equations 21, pp. 1897-1918,1996.
33. Ringhofer, C. 'Computational Methods for Semiclassical and Quantum Transport in Semiconductor Devices', 'Acta Numerica' pp. 485-521, 1997.
34. Ringhofer, C. and Gobbert, M.K., 'An asymptotic analysis for a model of chemical vapor deposition on a micro structured surface' to appear, SIAM Journal on Applied Mathematics.
35. Ringhofer, C. and Arnold, A., 'Operator Splitting Methods Applied to Spectral Discretizations of Quantum Transport Equations', SIAM J. Num. Anal. 33, pp.1876-1894, 1995.
36. Spanos, J., et. al., "Real-time statistical process control using tool data", IEEE Tran. Semiconductor Manuf., vol. 5, no. 4, 1992.
37. Srivatsan, N. and Kempf, K, A linear programming model of a re-entrant system, prepared notes, Intel Corporation, Technology & Manufacturing Group, July, 1994.
38. Stoddard, K.D., Crouch, P.E., Kozicki, M. and Tsakalis, K.S., "Application of Feed-Forward and Adaptive Feedback Control to Semiconductor Device Manufacturing," Proc. American Control Conference, 892-896, Baltimore, 1994.
39. Tsakalis, K. S. and loannou, P. A., Linear Time-Varying Systems: Control and Adaptation. Prentice-Hall, Englewood Cliffs, New Jersey, 1993.
40. Tsakalis, K. S., "Robustness of Model Reference Adaptive Controllers: An Input-Output Approach," IEEE Trans. Automat. Contr., Vol. 38, No. 5, pp. 556-565, May 1992.
41. Tsakalis, K.S. and Limanond, Suttipan, "Asymptotic Performance Guarantees in Adaptive Control," Int. J. of Adaptive Control and Signal Processing, 1994.
42. Tsakalis, K.S., "Performance Limitations of Adaptive Parameter Estimation and System Identification Algorithms in the Absence of Excitation," Automatica, 1996.
43. Tsakalis, K.S., Flores-Godoy, J.J. and Rodriguez, A.A., "Hierarchical Modeling and Control of Re-Entrant Semiconductor Fabrication Lines: A Mini-Fab Benchmark," Proc. 6th IEEE Int. Conference on Emerging Technologies and Factory Automation, 508-513 Los Angeles, Sept. 1997.
44. Tsakalis, K.S. and K.D. Stoddard, "Integrated Identification and Control for Diffusion/CVD Furnaces Proc. 6th IEEE Int. Conference on Emerging Technologies and Factory Automation," 514-519 Los Angeles, Sept. 1997. Vaja, S. et al., Similarity transformation approach to identifiability analysis of nonlinear compartmental models, Math. Biosci, 93, n. 2, 217 -248, 1989.
45. Tsakalis, K.S. and K.D. Stoddard, "Integrated Identification and Control for Diffusion/CVD Furnaces Proc. 6th IEEE Int. Conference on Emerging Technologies and Factory Automation," 514-519 Los Angeles, Sept. 1997. Vaja, S. et al., Similarity transformation approach to identifiability analysis of nonlinear compartmental models, Math. Biosci, 93, n. 2, 217 -248, 1989.
46. Zaslavsky, B.G., Rodriguez, A.A., and Collins, D.W. "Time Optimal Control for Re-entrant Semiconductor Fabrication Lines," Submitted to 37th IEEE Conference on Decision and Control, December 10-12, 1997.
47. Zaslavasky, B.G., Collins, D.W., and Rodriguez, A.A., Optimization of manufacturing processes by positive control methods, Submitted June 28, 1995, for IFACí95 World Congress.
48. Zaslavsky, B.G. and Collins, D.W., "Positive Control Approach to Semiconductor Scheduling Problems", Proceedings of Motorola International Symposium on Factory Integration and Moeling, October 19-20, 1995, Tempe, AZ (invited paper).