Hierarchical modeling and control of re-entrant semiconductor manufacturing facilities

Proceedings of the IEEE Conference on Decision and Control

Volumn 2, Issue , 1996, Pages 1736-1742

  El Adl, Mohamed K ^a   Rodriguez, Armando A ^a   Tsakalis, Kostas S ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; DISCRETE TIME CONTROL SYSTEMS; FEEDBACK; HIERARCHICAL SYSTEMS;

DISCRETE EVENT SYSTEMS; HIGH LEVEL FLOW MODEL; HIGH LEVEL STATE VARIABLE FEEDBACK;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030415771     PISSN: 01912216     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Review

References (13)