A bubble-powered micro-rotor: Manufacturing, assembly and characterization

American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS

Volumn , Issue , 2006, Pages

  Kao, Jonathan ^a   Warren, John ^b   Xu, Jie ^c   Attinger, Daniel ^c  

^a STONY BROOK UNIVERSITY   (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c Och Spine at New York Presbyterian Hospitals   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVES; BUBBLES (IN FLUIDS); FLOW INTERACTIONS; MEMS; PHOTOLITHOGRAPHY; ROTORS;

ACOUSTIC EXCITATION AMPLITUDE; MICROROTOR ACTUATION; MICROSCALE; ROTARY POWER;

MICROACTUATORS;

EID: 85196484765     PISSN: 1096665X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2006-14675     Document Type: Conference Paper

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