Femtosecond-pulse laser machining of semiconducting materials

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2000, Pages 389-

  Bonse, J ^a   Baudach, S ^a   Krueger, J ^a   Lenzner, M ^a   Wrobel, J M ^a   Kautek, W ^a  

^a Federal Institute for Materials Research   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLINE MATERIALS; DIELECTRIC MATERIALS; LASER ABLATION; MACHINING; SEMICONDUCTING SILICON;

FEMTOSECOND PULSE LASER MACHINING; SURFACE DAMAGE THRESHOLDS;

LASER PULSES;

EID: 0033681292     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)