Constrained parametric optimization of point geometries in multi-beam-interference lithography

Optics InfoBase Conference Papers

Volumn , Issue , 2010, Pages

  Burrow, Guy M ^a   Gaylord, Thomas K ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTENSITY PROFILES; MULTIBEAM INTERFERENCES; PARAMETRIC OPTIMIZATION; POINT GEOMETRY;

CONSTRAINED OPTIMIZATION;

EID: 85088345383     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: 10.1364/fio.2010.fws3     Document Type: Conference Paper

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