Micromechanical sensors in tactical GN&C applications

AIAA Guidance, Navigation, and Control Conference and Exhibit

Volumn , Issue , 2000, Pages

  Connelly, J ^a   Kourepenis, A ^a   Marinis, T ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; MICRO SATELLITES; MICROELECTROMECHANICAL DEVICES; NAVIGATION; SILICON WAFERS; SYSTEM-ON-CHIP;

BATCH MANUFACTURING; DEEP REACTIVE ION ETCH; DIGITAL ELECTRONICS; FUTURE ARCHITECTURES; GUIDANCE , NAVIGATION , AND CONTROLS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINED SILICON; MICROMECHANICAL SENSORS;

WSI CIRCUITS;

EID: 85088344366     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2000-4381     Document Type: Conference Paper

References (7)

1. Greiff, P., B. Boxenhorn, T. King, and L. Niles, "Silicon Monolithic Gyroscope," Transducers '91, Digest of Technical Papers, pp. 966-969, 1991 International Conference on Solid State Sensors and Actuators, IEEE Cat. #91CH2817-5, June 24, 1991.
2. Connelly, J., G. Brand, "Advances in Micromechanical Systems for Guidance, Navigation, and Control," AIAA Guidance, Navigation, and Control Conference, New Orleans, LA, 11-13 August 1997.
3. Weinberg, M., J. Bernstein, S. Cho, A.T. King, A. Kourepenis, P. Ward, "Initial Results on Micromachined Comb Drive Gyroscope with EDM2 Electronics," CSDL-P-3398, presented at the 1994 Joint Service Data Exchange, October 31- November 3, 1994, Scottsdale Arizona.
4. Greiff, P., R. Hopkins, R. Lawson, Silicon Accelerometers," presented at the 52nd Annual Meeting of The Institute of Navigation "Navigational Technology for the 3rd Millennium, June 19-21, 1996, Cambridge, MA.
5. Dowdle, J. and K. Flueckiger, "An Integrated GPS/Micromechanical IMU for Navy 5 Projectiles," The Institute of Navigation Conference, Cambridge, MA, June 18-20, 1996.
6. Larsen, D., R. Elliott, R. Rabitz, D. Norman, Radiation Effects Assessment for the MEMS Tuning Fork Gyro, Draper Report R-2869, June 1999.
7. Kourepenis, A., J. Borenstein, J. Connelly, R. Elliot, P. Ward, M. Weinberg, "Performance of MEMS Inertial Sensors," 24th Joint Services Data Exchange Conference, Anaheim, CA, November 16-20, 1998.