Silicon accelerometers

Proceedings of the Annual Meeting - Institute of Navigation

Volumn , Issue , 1996, Pages 713-718

  Greiff, P ^a   Hopkins, R ^a   Lawson, R ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; SILICON SENSORS;

SILICON ACCELEROMETERS;

ACCELEROMETERS;

EID: 0030312608     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)