Micromechanical sensors in tactical GN&C applications

AIAA Guidance, Navigation, and Control Conference and Exhibit

Volumn , Issue , 2001, Pages

  Connelly, J ^a   Kourepenis, A ^a   Marinis, T ^a   Hanson, D ^a  

^a CHARLES STARK DRAPER LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; MICRO SATELLITES; MICROELECTROMECHANICAL DEVICES; NAVIGATION; SILICON WAFERS; SYSTEM-ON-CHIP;

BATCH MANUFACTURING; DEEP REACTIVE ION ETCH; DIGITAL ELECTRONICS; FUTURE ARCHITECTURES; GUIDANCE , NAVIGATION , AND CONTROLS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); MICROMACHINED SILICON; MICROMECHANICAL SENSORS;

WSI CIRCUITS;

EID: 85086491418     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2001-4407     Document Type: Conference Paper

References (7)

1. Greiff, P., B. Boxenhorn, T. King, and L. Niles, 'Silicon Monolithic Gyroscope, ' Transducers '91, Digest of Technical Papers, pp. 966-969, 1991 International Conference on Solid State Sensors and Actuators, IEEE Cat. #91CH2817-5, June 24, 1991.
2. Connelly, J., G. Brand, 'Advances in Micromechanical Systems for Guidance, Navigation, and Control, ' AIAA Guidance, Navigation, and Control Conference, New Orleans, LA, 11-13 August 1997.
3. Weinberg, M., J. Bernstein, S. Cho, A.T. King, A. Kourepenis, P. Ward, 'Initial Results on Micromachined Comb Drive Gyroscope with EDM2 Electronics, ' CSDL-P-3398, presented at the 1994 Joint Service Data Exchange, October 31-November 3, 1994, Scottsdale Arizona.
4. Greiff, P., R. Hopkins, R. Lawson, 'Silicon Accelerometers, ' presented at the 52nd Annual Meeting of The Institute of Navigation 'Navigational Technology for the 3rd Millennium, ' June 19-21, 1996, Cambridge, MA
5. Dowdle, J. and K. Flueckiger, 'An Integrated GPS/Micromechanical IMU for Navy 5' Projectiles, 'The Institute of Navigation Conference, Cambridge, MA, June 18-20, 1996.
6. Larsen, D., R. Elliott, R. Rabitz, D. Norman, Radiation Effects Assessment for the MEMS Tuning Fork Gyro, Draper Report R-2869, June 1999.
7. Kourepenis, A., J. Borenstein, J. Connelly, R. Elliot, P. Ward, M. Weinberg, 'Performance of MEMS Inertial Sensors, ' 24th Joint Services Data Exchange Conference, Anaheim, CA, November 16-20, 1998.