Generalized algorithm for phase shifting interferometry

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2860, Issue , 1996, Pages 34-44

  Tang, Shouhong ^a  

^a Phase Shift Technology   (United States)

Author keywords

Optical metrology; Phase shifting interferometry; Phase measuring algorithms

Indexed keywords

PHASE MEASUREMENT;

ARBITRARY PHASE SHIFTS; DEGREE OF TOLERANCE; GENERALIZED ALGORITHMS; MEASURING ALGORITHM; OPTICAL METROLOGY; PHASE ESTIMATION; PHASE SHIFTING INTERFEROMETRY; WEIGHT FUNCTIONS;

LASER INTERFEROMETRY;

EID: 85077786598     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.276324     Document Type: Conference Paper

References (16)

1. J. H. Bruning, D. R. Herriott, J. E. Gallagher, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, "Digital wavefront measuring interferometer for testing optical surfaces and lenes," Appl. Opt. 13, 2693-2703 (1974).
2. C. L. Koliopoulos, "Interferometric optical phase measurement techniques," Ph.D. Dissertation, Optical Sciences Center, University ofArizona (1981).
3. K. Kinnstaetter, A. W. Lohmann, J. Schwider, and N. Streibi, "Accuracy of phase shifting interferometry," Appl. Opt. 27, 5082-5089 (1988).
4. M. Melozzi, L. Pessati, and A. Mazzoni, "Vibration-insensitive interferometer for on-line measurements," Appl. Opt. 34, 5595-5601 (1995).
5. K. Creath, "Phase-measurement interferometry techniques," Prog. Opt. 26, 349-393 (1988).
6. K. Freischlad and C.L. Koliopoulos, "Fourier description of digital phase-measuring interferometry," J. Opt. Soc. Am. A7, 542-551 (1990).
7. C. Joenathan, "Phase-measuring interferometry: new methods and error analysis," Appl. Opt. 33, 4147-4155 (1994).
8. P. Hariharan, B. F. Oreb, and T. Eiju, "Digital phase-shifting interferometry: a simple errorcompensating phase calculation algorithm," Appl. Opt. 26, 2504-2506 (1987).
9. K. G. Larkin and B. F. Oreb, "Design and assessment of symmetrical phase-shifting algorithms," J. Opt. Soc. Am. A9, 1740-1748 (1992).
10. P. D. Groot, "Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window," Appl. Opt. 34, 4723-4730(1995).
11. Y. Surrel, "Design of algorithms for phase measurements by the use of phase stepping," Appl. Opt. 35, 51-60 (1996).
12. C. J. Morgan, "Least-squares estimation in phase-measurement interferometer," Opt. Lea. 7, 368-370 (1982).
13. J. E. Greivenkamp, "Generalized data reduction for heterodyne Interferometry," Opt. Eng. 23, 350-352 (1984).
14. G. Lai and T. Yatagai, "Generalized phase-shifting interferometry," J. Opt. Soc. Am. A8, 822-827 (1991).
15. G. S. Han and S. W. Kim, "Numerical correction of reference phases in phase-shifting interferometry by iterative least-squares fitting," Appl. Opt. 33, 7321-7325 (1994).
16. I. B. Kong and S. W. Kim, "Portable inspection of precision surfaces by phase-shifting interferometry with automatic suppression of phase-shift errors," Opt. Eng. 34, 1400-1404 (1995).