Low friction property and its mechanism of DLC-Si films under dry sliding conditions

SAE Technical Papers

Volumn , Issue , 2007, Pages

  Mori, Hiroyuki ^a   Takahashi, Naoko ^a   Kazuyuki, Nakanishi ^a   Tachikawa, Hideo ^a   Ohmori, Toshihide ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON FILMS; DIAMOND LIKE CARBON FILMS; FRICTION; SILICON WAFERS; TRIBOLOGY;

ADSORBED WATER; DERIVATIZATIONS; FRICTION COEFFICIENTS; FRICTION PROPERTIES; LOW FRICTION COEFFICIENTS; LOW-FRICTION PROPERTIES; SILICON CONTENTS; SLIDING CONDITIONS;

SILICON ALLOYS;

EID: 85072443822     PISSN: 01487191     EISSN: 26883627     Source Type: Journal    
DOI: 10.4271/2007-01-1015     Document Type: Conference Paper

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