Flow-structure instability prevention in a mems high flow gas valve

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2006, Pages 288-291

  Knobloch, Aaron J ^a   Seeley, Charles E ^a   Mulay, Amol ^b   Saia, Richard J ^a  

^a GE GLOBAL RESEARCH   (United States)

^b GE GLOBAL RESEARCH   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTRIC HEATING; FLUID STRUCTURE INTERACTION; MECHANICAL ACTUATORS; MICROSYSTEMS; Q FACTOR MEASUREMENT; RESONANCE; RIGID STRUCTURES; SILICONES; SOLID-STATE SENSORS; STRUCTURAL DESIGN; VISCOELASTICITY;

IN-PLANE DISPLACEMENT; NORMAL OPERATING CONDITIONS; OSCILLATING DISPLACEMENT; RESONANCE CONDITION; STRUCTURAL RESONANCE; SUPPORTING STRUCTURE; VISCOELASTIC PROPERTIES; VOLTAGE CONDITIONS;

COMPUTATIONAL FLUID DYNAMICS;

EID: 85062325628     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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