A quantitative approach for minimizing fab cost of ownership through systems integration

10th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop, ASMC 1999

Volumn , Issue , 1999, Pages 97-104

  Colvin, T D ^a   Rayter, J ^a   Paprotny, I ^a   Mackulak, G T ^b  

^a PRI Automation Inc   (United States)

^b AZ 85281   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMMERCE; COMPETITION; COSTS; INVESTMENTS; LIFE CYCLE; MANUFACTURE; SEMICONDUCTOR DEVICE MANUFACTURE;

COMPLEX PROBLEMS; COST OF OWNERSHIP; MARKET COMPETITION; QUANTITATIVE APPROACH; QUANTITATIVE METHOD; SEMICONDUCTOR FABS; SYSTEMS INTEGRATION; TOTAL LIFE CYCLE COSTS;

COST REDUCTION;

EID: 85040340118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ASMC.1999.798190     Document Type: Conference Paper

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