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Volumn 10315, Issue , 2005, Pages 73-75

Measurement of mild aspheric surfaces with subaperture stitching interferometry; Technical Digest

Author keywords

asphere; interferometry; metrology; subaperture stitching

Indexed keywords

INTERFEROMETERS; INTERFEROMETRY; MEASUREMENTS; MICROSCOPES;

EID: 85038943165     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.605743     Document Type: Conference Paper
Times cited : (4)

References (4)
  • 1
    • 84975635694 scopus 로고
    • Subaperture testing of aspheres with annular zones
    • Y-M. Liu, G. Lawrence and C. Koliopoulos, "Subaperture testing of aspheres with annular zones, " Applied Optics, 27, 4504-4513, 1988.
    • (1988) Applied Optics , vol.27 , pp. 4504-4513
    • Liu, Y.-M.1    Lawrence, G.2    Koliopoulos, C.3
  • 3
    • 0141868831 scopus 로고    scopus 로고
    • Stitching interferometry: A flexible solution for surface metrology
    • May
    • P. Murphy, et al., "Stitching interferometry: a flexible solution for surface metrology, " Optics and Photonics News, 14, 38-43, May 2003.
    • (2003) Optics and Photonics News , vol.14 , pp. 38-43
    • Murphy, P.1
  • 4
    • 2342572336 scopus 로고    scopus 로고
    • An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces
    • SPIE, Bellingham, WA, A. Duparre and B. Singh, Eds., Proc. SPIE
    • J. Fleig, P. Dumas, P. E. Murphy, G. W. Forbes, "An automated subaperture stitching interferometer workstation for spherical and aspherical surfaces, " Advanced Characterization Techniques for Optics, Semiconductors and Nanotechnologies, A. Duparre and B. Singh, Eds., Proc. SPIE 5188, 296-307, SPIE, Bellingham, WA, 2003.
    • (2003) Advanced Characterization Techniques for Optics, Semiconductors and Nanotechnologies , vol.5188 , pp. 296-307
    • Fleig, J.1    Dumas, P.2    Murphy, P.E.3    Forbes, G.W.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.