Self-aligned ormosil waveguide devices

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3469, Issue , 1998, Pages 58-65

  Li, Kewen K ^a   Salley, Edward J ^a   Melman, Paul ^a   Tabasky, Marvin J ^a   Zhao, Jing ^a   Li, Chia Yen ^b  

^a NZ Applied Technologies   (United States)

^b MicroTouch Systems   (United States)

Author keywords

Micromachining; Ormosil; Passive alignment; Self alignment; Silicon v groove; Sol gel; Waveguides

Indexed keywords

ALIGNMENT; COST REDUCTION; MICROMACHINING; OPTICAL FIBER FABRICATION; OPTICAL FIBERS; ORGANIC-INORGANIC MATERIALS; SILICON COMPOUNDS; SILICON WAFERS; SOL-GEL PROCESS; SOL-GELS; WAVEGUIDE COMPONENTS; WAVEGUIDES;

HIGH PRECISION ALIGNMENTS; MANUFACTURING PROCESS; OPTICAL FIBER RIBBONS; ORMOSIL; PASSIVE ALIGNMENT; SELF ALIGNMENT; SILICON V-GROOVE; WAVEGUIDE MATERIALS;

OPTICAL WAVEGUIDES;

EID: 85031527794     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.312920     Document Type: Conference Paper

References (10)

1. ™ Technology for Passive Optical Interconnects", SPIE Proc. 2690, pp 361-368, 1996
2. L. Eldada, L. W. Shacklette, R. A. Norwood and J. T. Yardley, "Next-generation Polymeric Photonic Devices", SPIE CR68, pp. 207-227, 1997.
3. H Krug, F Tiefensee, P. W. Oliveira and H. Schmidt, "Organic-Inorganic Composite Materials: Optical Properties of Laser Patterned and Protective Coated Waveguides", Sol-Gel Optics 11, SPIE Proc. 1758, pp 448-455. 1992
4. C.-Y. Li, J Chisham, M Andrews, S. I. Najafi, J. D. Mackenzie and N Peyghambarian, "Sol-Gel Integrated Optical Coupler by Ultraviolet Light Imprinting", Electron. Lett. 31, pp. 271-272, 1995
5. P. Coudray, J. Chisham, A. Malek-Tabrizi, C. Y. Li, M. P. Andrews, N. Peyghambarian and S. I. Najafi, "Ultraviolet Light Imprinted Sol-gel Silica Glass Waveguide Devices on Silicon", Optics Comm. 128, pp. 19-22, 1996.
6. V. G. Levich, Physicochemical Hydrodynamics, pp. 674-683, Prentice-Hall, New Jersey, 1963.
7. K. K. Li, G. H. Haertling and W.-Y. Howng, "An Automatic Dip Coating Process for Dielectric Thin and Thick Films", Integrated Ferroelectrics 3, pp. 81-91 (1992).
8. P. Coudray, J. Chisham, M. P. Andrews and S. I. Najafi, "Ultraviolet Light Imprinted Sol-gel Silica Glass Low-loss Waveguides for Use at 1.55 μm", Opt. Eng 36, pp. 1234-1240, 1997.
9. K. Bean, "Anisotropic Etching of Silicon", IEEE Trans, on Electron. Devices ED-25, 1978.
10. C. A. Armiento, A. J. Negri, M. J. Tabasky, R. A. Boudreau, M. A. Rothman, T. W. Fitzgerald and P. O. Haugsjaa, "Gigabit Transmitter Array Modules on Silicon Waferboard", IEEE Trans, on Components, Hybrids, andManufact. Tech. 15, pp. 1072-1080, 1992.