Optimization of tungsten oxide films electro-deposited on macroporous silicon for gas sensing applications: Effect of annealing temperature

Ceramics International

Volumn 40, Issue PB, 2014, Pages 16603-16610

  Mendoza Aguero N ^a   Kumar, Y ^a   Olive Mendez S F ^c   Campos Alvarez, J ^b   Agarwal, V ^a  

^a UNIVERSIDAD AUTÓNOMA DEL ESTADO DE MORELOS   (Mexico)

^b INSTITUTO DE ENERGÍAS RENOVABLES   (Mexico)

^c CENTRO DE INVESTIGACIÓN EN MATERIALES AVANZADOS   (Mexico)

Author keywords

Electrodeposition; Gas sensing; Macroporous silicon; Tungsten oxide films

Indexed keywords

ANNEALING; CHEMICAL DETECTION; ELECTRODEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; GAS DETECTORS; GAS SENSING ELECTRODES; GRAIN SIZE AND SHAPE; OXIDES; POROUS SILICON; REDUCTION; SCANNING ELECTRON MICROSCOPY; SILICON; TUNGSTEN; TUNGSTEN COMPOUNDS; X RAY DIFFRACTION;

DC CONDUCTIVITY MEASUREMENTS; ELECTRICAL AND SENSING PROPERTIES; ELECTROCHEMICAL DEPOSITION; ENERGY DISPERSIVE X-RAY SPECTROSCOPY; GAS SENSING; GAS SENSING APPLICATIONS; MACRO POROUS SILICON; TUNGSTEN OXIDE FILMS;

OXIDE FILMS;

EID: 85027921074     PISSN: 02728842     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ceramint.2014.08.019     Document Type: Article

References (41)

1. x sensors based on semiconducting metal oxide nanostructures: progress and perspectives Sens. Actuators B 171-172 2012 25 42
2. A. Lari, A. Khodadadi, and Y. Mortazavi Semiconducting metal oxides as electrode material for YSZ-based oxygen sensors Sens. Actuators B 139 2009 361 368
3. B. Hu, W. Chen, and J. Zhou High performance flexible sensor based on inorganic nanomaterials Sens. Actuators B 176 2013 522 533
4. H.J. Kim, and J.H. Lee Highly sensitive and selective gas sensors using p-type oxide semiconductors: overview Sens. Actuators B 192 2014 607 627
5. 3 thin films for optical gas sensing Procedia Eng. 25 2011 260 263
6. 3 nanocomposite and its molecular recognitive photocatalytic degradation of target contaminant Environ. Sci. Technol. 47 2013 7404 7412
7. L. Meda, A.M. Dangerfield, M.C. Jones, C.M. White, and A. Navulla Electrochemical properties of tungsten oxide nanowires compared to bulk particles Jpn. J. Appl. Phys. 51 2012 11PE06
8. 2 gasochromic films doped with Pd catalyst Appl. Mater. Interfaces 3 2011 4573 4579
9. J. Wang, X.W. Sun, and Z. Jiao Application of nanostructures in electrochromic materials and devices: recent progress Materials 3 2010 5029 5053
10. M.J. Vellekoop, C.C.O. Visser, P.M. Sarro, and A. Venema Compatibility of zinc oxide with silicon IC processing Sens. Actuators A: Phys. 23 1990 1027
11. N. Tahmasebi Garavand, M. Ranjbar, S.M. Mahdavi, and A. Iraji Zad, Colouration process of colloidal tungsten oxide nanoparticles in the presence of hydrogen gas Appl. Surf. Sci. 2012 10089 10094
12. Y.S. Kim Thermal treatment effects on the material and gas-sensing properties of room-temperature tungsten oxide nanorod sensors Sens. Actuators B 137 2009 297 304
13. T.A. Nguyen, S. Park, J.B. Kim, T.K. Kim, G.H. Seong, J. Choo, and Y.S. Kim Polycrystalline tungsten oxide nanofibers for gas-sensing applications Sens. Actuators B 160 2011 549 554
14. Y. Zhang, J. Yuan, J. Le, L. Song, and X. Hu Structural and electrochromic properties of tungsten oxide prepared by surfactant-assisted process Sol. Energy Mater. Sol. Cells 93 2009 1338 1344
15. 2 Mater. Lett. 99 2013 57 60
16. 3 thin films on alumina substrates Thin Solid Films 410 2002 194 199
17. 2 sensors Mater. Lett. 112 2013 12 15
18. V. Torres-Costa, and R.J. Martín-Palma Application of nanostructured porous silicon in the field of optics. A review J. Mater. Sci. 45 2010 2823 2838
19. R.C. Anderson, R.S. Muller, and C.W. Tobias Investigations of porous Si for vapor sensing Sens. Actuators A 21-23 1990 835 839
20. H. Foll, M. Christophersen, J. Carstensen, and G. Hasse Formation and application of porous silicon Mater. Sci. Eng. R 39 2002 93 141
21. L. Pavesi, Z. Gaburro, L.D. Negro, P. Bettotti, G.V. Prakash, M. Cazzanelli, and C.J. Oton Nanostructured silicon as a photonic material Opt. Lasers Eng. 39 2003 345 368
22. P. Granitzer, and K. Rumpf Porous silicon - a versatile host material Materials 3 2010 943 998
23. E.J. Anglin, L. Cheng, W.R. Freeman, and M.J. Sailor Porous silicon in drug delivery devices and materials Adv. Drug Deliv. Rev. 60 2008 1266 1277
24. P. Menna, G.D. Francia, and V. La Ferrara Porous silicon in solar cells: a review and description of its application as an AR coating Sol. Energy Mater. Sol. Cells 37 1995 13 24
25. 3/Si (111) thin films for infrared emittance modulation applications J. Phys. D: Appl. Phys. 34 2001 2260 2266
26. F. Galléa, Z. Li, and Z. Zhang Growth control of tungsten oxide nanostructures on planar silicon substrates Appl. Phys. Lett. 89 2003 193111
27. 3 nanoparticles/porous silicon Appl. Surf. Sci. 292 2014 551 555
28. 3-x/n-porous silicon at room temperature Sens. Actuators B 186 2013 140 147
29. N. Mendoza-Agüero, and V. Agarwal Optical and structural characterization of tungsten oxide electrodeposited on nanostructured porous silicon: effect of annealing atmosphere and temperature J. Alloys Compd. 581 2013 596 601
30. M. Deepa, P. Singh, S.N. Sharma, and S.A. Agnihotry Effect of humidity on structure and electrochromic properties of sol-gel-derived tungsten oxide films Sol. Energy Mater. Sol. Cells 90 2006 2665 2682
31. 2O tungsten trioxide hydrates J. Solid State Chem. 67 1987 235
32. 3 films Electro Chim. Acta 46 2001 1921 1929
33. 3 films J. Sol-Gel Sci. Technol. 24 2002 5 22
34. 3 films prepared by the sol-gel method C.R. Chim. 9 2006 301 306
35. 2 mixtures J. Appl. Phys. 84 1998 5515
36. 3 films: synthesis, characterization, and applications J. Am. Chem. Soc. 123 2001 10639 10649
37. A.H. Jayatissa, and S.T. Cheng Optoelectronic properties of nanocrystalline tungsten oxide thin films IEEE-Nano 2002 25 28 ISSN: 0169-555X, URL: 〈 http://ieeexplore.ieee.org/xpl/articleDetails.jsp%3Freload%3Dtrue%26arnumber%3D1032115%26contentType%3DConference%2BPublications 〉
38. K. Bange Colouration of tungsten oxide films: a model for optically active coatings Sol. Energy Mater. Sol. Cells 58 1999 1 131
39. 3 thin films during annealing Thin Solid Films 408 2002 302 309
40. N. Barsan, and U. Weimar Conduction model of metal oxide gas sensors J. Electroceram. 7 2001 143 167
41. 3 sensors under ethanol vapors Sens. Actuators B: Chem. 119 2006 374 379