Excimer lasers for material ablation cross the 1.5 kHz mark

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2992, Issue , 1997, Pages 2-6

  Patzel R ^a   Stamm, U ^a   Bragin, I ^a   Voss F ^a   Nikolaus, B ^a   Endert, H ^a   Basting, D ^a  

^a Lambda Physik GmbH   (Germany)

Author keywords

Ablation; Excimer laser; Solid state switch; Step scan structuring

Indexed keywords

ABLATION; EXCIMER LASERS; FLAT PANEL DISPLAYS; LASER ABLATION; PULSE REPETITION RATE; THIN FILM TRANSISTORS;

DEEP-UV LITHOGRAPHY; HIGH REPETITION RATE; HIGH REPETITION RATE LASERS; INHERENT LIMITATIONS; PROCESSING PARAMETERS; SOLID STATE SWITCH; SOLID-STATE SWITCHING; STATE-OF-THE-ART TECHNOLOGY;

LASER APPLICATIONS;

EID: 85025998118     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.270082     Document Type: Conference Paper

References (5)

1. R. S. Patel, T. F. Redmond, C. Tessler, D. Tudryn, D. Pulaski, "Via production benefits from Excimer Laser Tools" Laser Focus World 32 (1) (1996) 71-75
2. V. Pfeuffer, F. Voss, B. Becker-de Mos, U. Stamm, H. Endert, D. Basting "Optimization of 200 W excimer laser for TFT annealing" LASE 97 SPIE Proceedings Vol. 2992
3. Patent 3335690.4 (D) "Vorrichtung zum Erzeugen von Hochleistungs-Hochspannungsimpulsen hoher Wiederholfrequenz", 27.3. 1986
4. H. M. V. Bergmann, P. H. Swart "A11 solid state pulsers for high repetition rate multi kilowatt lasers" IEEE Proceedings-B, Vol. 139, 123-130, 1992
5. D. Basting "Ink jet nozzle drilling using excimer line beam illuminated mask" Lambda Industrial No. 10, A publication by Lambda Physik GmbH, 1996