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Volumn 75, Issue 20, 2016, Pages 61-69
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Plasma-assisted ALD of LiPO(N) for solid state batteries
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Author keywords
[No Author keywords available]
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Indexed keywords
ASPECT RATIO;
ATOMIC LAYER DEPOSITION;
DOPING (ADDITIVES);
ELECTRODES;
IONS;
LITHIUM COMPOUNDS;
LITHIUM-ION BATTERIES;
SOLID STATE DEVICES;
SOLID-STATE BATTERIES;
TITANIUM COMPOUNDS;
CONFORMAI COATINGS;
FABRICATED DEVICE;
HIGH ASPECT RATIO;
HIGH POWER CAPABILITY;
INCREASED SAFETY;
LI ION CONDUCTIVITIES;
LITHIUM PHOSPHATE;
METALLIC LITHIUM;
SOLID ELECTROLYTES;
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EID: 85018648019
PISSN: 19386737
EISSN: 19385862
Source Type: Conference Proceeding
DOI: 10.1149/07520.0061ecst Document Type: Conference Paper |
Times cited : (15)
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References (11)
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