Preparation of Tin Oxide (SnO2) thin Film Gas Sensor by PLD Method

IEEJ Transactions on Electronics, Information and Systems

Volumn 123, Issue 2, 2003, Pages 222-227

  Suda, Yoshiaki ^a   Kawasaki, Hiroharu ^a   Iwatsuji, Keitarou ^a   Ohshima, Tamiko ^b  

^a SASEBO NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

Author keywords

gas sensor; pulsed laser deposition; thin film; tin oxide

Indexed keywords

EID: 85018133197     PISSN: 03854221     EISSN: 13488155     Source Type: Journal    
DOI: 10.1541/ieejeiss.123.222     Document Type: Article

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