Effects of nonmelt laser annealing on a 5keV boron implant in silicon

Materials Research Society Symposium - Proceedings

Volumn 610, Issue , 2000, Pages B10.5.1-B10.5.5

  Earles, Susan ^a   Law, Mark ^a   Jones, Kevin ^a   Brindos, Rich ^a   Talwar, Somit ^b  

^a UNIVERSITY OF FLORIDA   (United States)

^b Verdant Technologies   (United States)

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EID: 85009892625     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: 10.1557/PROC-610-B10.5     Document Type: Article

References (2)