Development of a Linear Micro-Inductosyn Sensor

IEEE Transactions on Magnetics

Volumn 42, Issue 10, 2006, Pages 2830-2832

  Dinulovic, D ^a   Hermann, D ^a   Gatzen, H H ^a   Fluegge, J ^b  

^a Institute for Microtechnology   (Germany)

^b PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Electroplating; Inductosyn; MEMS; permalloy; positioning sensor; SU 8

Indexed keywords

EID: 85008065749     PISSN: 00189464     EISSN: 19410069     Source Type: Journal    
DOI: 10.1109/TMAG.2006.879141     Document Type: Article

References (8)

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