A Novel Saw Device in CMOS: Design, Modeling, and Fabrication

IEEE Sensors Journal

Volumn 7, Issue 2, 2007, Pages 219-227

  Tigli, Onur ^a   Zaghloul, Mona E ^a  

^a George Washington University   (United States)

Author keywords

Absorber; CMOS; finite element modeling; heater; surface acoustic wave (SAW)

Indexed keywords

EID: 85008044206     PISSN: 1530437X     EISSN: 15581748     Source Type: Journal    
DOI: 10.1109/JSEN.2006.883771     Document Type: Article

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