Integrated microelectromechanical systems in conventional CMOS

Proceedings - IEEE International Symposium on Circuits and Systems

Volumn 4, Issue , 1997, Pages 2821-2824

  Fedder, Gary K ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ASPECT RATIO; FABRICATION; MICROELECTROMECHANICAL DEVICES; SENSORS;

DIELECTRIC LAYERS; GAP SPACING; MASKLESS DRY ETCHING;

CMOS INTEGRATED CIRCUITS;

EID: 0030675430     PISSN: 02714310     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)