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Volumn 254, Issue 4, 2017, Pages
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Spectroscopic ellipsometry and optical transmission study of LiPON thin films prepared by RF sputtering
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Author keywords
lithium phosphorus oxynitride film; optical properties; optical transmission spectra; spectroscopic ellipsometry
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Indexed keywords
ELECTROLYTES;
FILM PREPARATION;
IONIC CONDUCTIVITY;
LIGHT TRANSMISSION;
LITHIUM COMPOUNDS;
MAGNETRON SPUTTERING;
NITRIDES;
OPTICAL BAND GAPS;
OPTICAL PROPERTIES;
SPECTROSCOPIC ELLIPSOMETRY;
THIN FILMS;
TRANSMISSIONS;
ELECTRONIC CONDUCTIVITY;
EXPONENTIAL DECAYS;
HIGH TRANSPARENCY;
LITHIUM PHOSPHORUS OXYNITRIDE;
LITHIUM PHOSPHORUS OXYNITRIDE FILMS;
OPTICAL TRANSMISSION SPECTRUM;
RF-MAGNETRON SPUTTERING;
VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;
OPTICAL FILMS;
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EID: 85000608405
PISSN: 03701972
EISSN: 15213951
Source Type: Journal
DOI: 10.1002/pssb.201600424 Document Type: Article |
Times cited : (8)
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References (21)
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