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Volumn 254, Issue 4, 2017, Pages

Spectroscopic ellipsometry and optical transmission study of LiPON thin films prepared by RF sputtering

Author keywords

lithium phosphorus oxynitride film; optical properties; optical transmission spectra; spectroscopic ellipsometry

Indexed keywords

ELECTROLYTES; FILM PREPARATION; IONIC CONDUCTIVITY; LIGHT TRANSMISSION; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; NITRIDES; OPTICAL BAND GAPS; OPTICAL PROPERTIES; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS; TRANSMISSIONS;

EID: 85000608405     PISSN: 03701972     EISSN: 15213951     Source Type: Journal    
DOI: 10.1002/pssb.201600424     Document Type: Article
Times cited : (8)

References (21)
  • 12
    • 0020940620 scopus 로고
    • R. Swanepoel, J. Phys. E: Sci. Instrum. 16, 1214–1222 (1983). J. Phys. E: Sci. Instrum. 17, 896–903 (1984).
    • (1983) J. Phys. E: Sci. Instrum , vol.16 , Issue.1984 , pp. 1214-1222
    • Swanepoel, R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.