A compact filament-driven multicusp ion source

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 119, Issue 4, 1996, Pages 543-548

  Lee, Y ^a,b   Gough, R A ^a   Kunkel, W B ^a   Leung, K N ^a   Perkins, L T ^a,b   Pickard, D S ^a   Sun, L ^a   Vujic, J ^a,b   Williams, M D ^a   Wutte, D ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b University of California at Berkeley   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN; ION BEAMS;

HYDROGEN IONS; MULTICUSP ION SOURCES;

ION SOURCES;

EID: 0030386643     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00623-4     Document Type: Article

References (6)

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3. K.M. Leung, S.R. Walther and W.B. Kunkel, Phys. Rev. Lett. 62 (1989) 764.
4. T. Vilaithong, S. Singkarat, W. Pairsuwan, J.F. Kral, D. Boonyawan, D. Suwannakachom, S. Konklong, P. Kanjanarat and G.G. Hoyes, Proc. Int. Conf. at the Forschungszentrum Julich, 13-17 May 1991.
5. M.D. Williams and K.N. Leung, Rev. Sei. Instrum. 61 (1990) 475.
6. K.N. Leung, P. Herz, W.B. Kunkel, Y. Lee, L. Perkins, D. Pickard, M. Sarstedt, M. Weber and M.D. Williams, J. Vac. Sci. Technol. B 13 (1995) 2600.